Co-optical circuit double-frequency heterodyne confocal micromeasurer
Title：
Co-optical circuit double-frequency heterodyne confocal micromeasurer
Application Number：
 200410003475
Application Date：
 2004/03/30
Announcement Date：
 2005/01/12
Pub. Date：
Publication Number：
 1563882
Announcement Number：
 1238688
Grant Date：
 2006-1-25
Granted Pub. Date：
 2006-1-25
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01B 9/04, G01B 11/24
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Meng Yonggang, Liu Zhongyao, Yan Juqun
Key Words：
 Co-optical circuit, double-frequency, heterodyne confocal, micromeasurer
Abstract：
 The invention belongs to technique area for measuring appearance of surface, in order to raise resolving power and range, as well as guarantee high stability of the system. the disclosed device includes following parts: transverse Zeeman two-frequency laser, and beam splitter, first convergent lens, first pinhole, first contact lens, first semitransparent and half reflecting mirror, birefringence lens assembly and object lens of microscope setup on axis of laser in sequence; first photo detector on reflection path of the beam splitter; second semitransparent and half reflecting mirror; Glan prism, second contact lens, second pinhole etc. on reflection path of the second semitransparent and half reflecting mirror. Features are: low drift and high capability of antivibration and anti-interference.
Claim：
Priority：
PCT：
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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
2008-3-31
  Selected patents owned by Tsinghua University filed in 2006 and 2007 are load.







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