Method for making high dencity grating utilizing laser scanning cofocal microscope
Title：
Method for making high dencity grating utilizing laser scanning cofocal microscope
Application Number：
 200610011471
Application Date：
 2006/03/10
Announcement Date：
 2006/08/09
Pub. Date：
 2007/08/22
Publication Number：
 1815274
Announcement Number：
 1333271
Grant Date：
 2007-8-22
Granted Pub. Date：
 2007-8-22
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G02B 5/18G02B 1/00G03F 7/00
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Xie Huimin, Pan Bing, Fang Daining, Xing Yongming, An Benzhe, Dai Fulong
Key Words：
 high dencity grating, laser scanning cofocal microscope
Abstract：
 Under operation environment of laser scanning confocal microscope of mature commercial apparatus, using focalize laser point of wavelength, which is in range of wavelength sensitive to sensitization of photoresist, emitted from illuminated light sources carries out scanning exposure for photoresist on surface of substrate material of optical grating. It is possible to produce one dimensional grating, orthogonal grating or strain rosette grating by adjusting parameters: magnification of ocular of laser scanning confocal microscope, number of scanning lines, scanning number of time, and scanning direction. Features are: plain preparing principle, simple operation, without need of man induced arranged optical path and investment on specialized equipment, adjusting important parameters such as incident angle of laser beam, and low cost.
Claim：
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PCT：
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