Etchingmachine cluster controller and process module controller communication system and method
Title：
Etchingmachine cluster controller and process module controller communication system and method
Application Number：
 200610011316
Application Date：
 2006/02/09
Announcement Date：
 2007/03/28
Pub. Date：
Publication Number：
 1937505
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H04L 12/00
Applicant(s)：
 Beifang Microelectronic Base Apparatus Technology Research Center Co., Ltd., Bei
Inventor(s)：
Key Words：
 Etchingmachine, cluster controller, process module controller, communication
Abstract：
 This method includes the group controller (GC), the technology module controller (TMC), the Ethernet connecting GC and TMC and the comm. module, which transfers the control info and state info between GC and TMC via the Ethernet. The method is that: (1) prepare step, (2) net test connect step, (3) the practical comm. step. When it works normally, GC interacts info and instructions with TMC via Web server.
Claim：
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PCT：
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