Silicon tyre-pressure temperature sensor with monochip integration
Title：
Silicon tyre-pressure temperature sensor with monochip integration
Application Number：
 200710064142
Application Date：
 2007/03/02
Announcement Date：
 2007/09/05
Pub. Date：
Publication Number：
 101029838
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01D 21/02B60C 23/00
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Zhang Zhaohua, Lin Huiwang, Liu Litian, Ren Tianling
Key Words：
 tyre-pressure, temperature sensor, monochip integration
Abstract：
 A monolithic integrated pressure-temperature transducer on silicon membrane is prepared distributing pressure sensitive elements at stress centralized region and distributing temperature sensitive elements at stress non-sensitive region, correlating output of pressure sensitive element with pressure value and correlating output of temperature sensitive element with temperature value.
Claim：
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