Array-type integrated sensor based on weak-light electromechanical system for emitting or receiving laser
Title：
Array-type integrated sensor based on weak-light electromechanical system for emitting or receiving laser
Application Number：
 01141614
Application Date：
 2001/09/28
Announcement Date：
 2002/03/06
Pub. Date：
Publication Number：
 1338830
Announcement Number：
 1131610
Grant Date：
Granted Pub. Date：
 2003-12-17
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H01L 23/00, H01S 5/026, H04B 10/02
Applicant(s)：
 Qinghua Univ
Inventor(s)：
 Chen Feifan, Yuan Jingli, Chen Yifeng
Key Words：
 Array-type, integrated sensor, weak-light electromechanical system, emitting, receiving
Abstract：
 An array-type integrated sensor based on micro photo-mechano-electric system for receiving and transmitting laser is composed of frame, substrate, monosilicon structure body, semiconductor laser device, photoelectric detector, and glass. The micro semiconductor laser devices and micro semiconductor detectors are integrated on a substrate by special monosilicon structure body. The semiconductor laser transmitting and receiving cells are alternatively arranged.
Claim：
Priority：
PCT：
LegalStatus：

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