MEMS electromagnetic relays
Title：
MEMS electromagnetic relays
Application Number：
 200710119273
Application Date：
 2007/07/19
Announcement Date：
 2008/04/09
Pub. Date：
Publication Number：
 101159202
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H01H 51/01, H01H 50/16, H01H 50/44
Applicant(s)：
 Tsinghua University
Inventor(s)：
 You Zheng, Li Huijuan, Zhang Gaofei, Yang Jianzhong
Key Words：
 MEMS, electromagnetic relays
Abstract：
 An MEMS electromagnetic relay belongs to the technical fields of the relay and MEMS. In order to solve the problems that the prior micro-electromagnetic relay has large size and high power consumption and does not satisfy the requirements for a small-size, intelligent, and low-power-consumption electromagnetic relay of a miniature automatic detection instrument and a miniature aerospace vehicle. The invention discloses an MEMS electromagnetic relay, which adopts a three-layer structure comprising, from top to bottom, an upper silicon substrate, a lower silicon substrate, and a permanent magnet, wherein the upper silicon substrate is hollowed and has a middle swaying structure including a swaying plate supported by two swaying beams, and a movable contact electrode on the lowermost layer of the swaying plate; and two flat spiral coils are provided in the groove of the surface of the lower silicon substrate, an insulating layer covers the two flat spiral coils, two pairs of fixed contact electrodes are provided on the insulation layer, and each pair of the fixed contact electrodes contains two independent fixed contact electrodes separated from each other. The invention can be arrayed in large scale, and can be integrated with a control circuit on the same substrate.
Claim：
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PCT：
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2008-4-17
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