Target disc angle controlling and scanning motion mechanism of ion implantation apparatus |
Title： |
| Target disc angle controlling and scanning motion mechanism of ion implantation apparatus |
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Application Number： |
200410009225 |
Application Date： |
2004/06/18 |
Announcement Date： |
2005/03/16 |
Pub. Date： |
2006/12/20 |
Publication Number： |
1595599 |
Announcement Number： |
1291445 |
Grant Date： |
2006-12-20 |
Granted Pub. Date： |
2006-12-20 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01J 37/317, H01L 21/265 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Wang Jinsong, Zhu Yu, Yu Hui |
Key Words： |
Target disc angle, controlling, scanning, motion mechanism, ion implantation apparatus |
Abstract： |
An angle control and scan moving mechanism of target in ion impregnating machine, belongs to semiconductor technical field. Its chrarcteristics are: the angle control and scan moving mechanism is PR-PRR-typed tow- branched chain two degree of freedom plane, which includes target, the first branched chain and second branched chain. The invention has solved the problems of low rigidity of present series-wound target angle control and scanning mechanism and too much load of bottom parts which is connected to cavity, at the same time, benefit for its driving motor to be installed out of the cavity and avoiding bad effect of placing driving motor in the cavity. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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