Micro liquid drop driver based on power-on wetting of medium layer
Title：
Micro liquid drop driver based on power-on wetting of medium layer
Application Number：
 200410080348
Application Date：
 2004/09/30
Announcement Date：
 2005/03/02
Pub. Date：
 2006/10/11
Publication Number：
 1587023
Announcement Number：
 1278921
Grant Date：
 2006-10-11
Granted Pub. Date：
 2006-10-11
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 B81B 7/00
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Yue Ruifeng, Zeng Xuefeng, Wu Jiangang
Key Words：
 Micro liquid drop, driver, power-on wetting, medium layer
Abstract：
 The present invention discloses one kind of micro liquid drop driver based on electric wetting on medium layer and belongs to the field of micro complete analysis system and micro electromechanical system. On monocrystal silicon, there are one lower plate substrate layer of hot oxide SiO2, one Ti/Pt electrode array, one thin film medium layer, one hydrophobic layer of fluorocarbon polymer, and upper plate glass sheet with hydrophobic layer and ITO and supported with some support, successively. The micro liquid drop driver has low micro liquid drop driving voltage, simple making process and low cost, and other liquid drop operation may be further integrated on the same chip.
Claim：
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PCT：
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  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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