Method for detecting silicon chip state in chip case and repositioning its circle center
Title：
Method for detecting silicon chip state in chip case and repositioning its circle center
Application Number：
 200510135546
Application Date：
 2005/12/30
Announcement Date：
 2006/07/12
Pub. Date：
 2007/12/12
Publication Number：
 1801471
Announcement Number：
 100355056
Grant Date：
 2007-12-12
Granted Pub. Date：
 2007-12-12
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H01L 21/68, G01B 11/00, G03F 7/20
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Song Yixu, Zhao Yannan, Yang Zehong, Wang Jiaqin, Li Shichang, Jia Peifa, Deng Zhidong
Key Words：
 silicon chip state, chip case, detect, reposition, circle center
Abstract：
 The invention relates to state detection for silicon slice in box, which comprises: setting large, middle and small light intensity threshold values as I01, I1 and I2 respectively; detecting the first sensor opposite to IS1, if IS1£½I01, showing no silicon slice in slot; for I01£¾IS1£¾I1, only one silicon slice; for I1¡ÝIS1£¾I2, there is overlap of silicon slice; if IS1¡ÜI2, showing there is silicon slice inclined. It also relates to a relocation method for circle centre of silicon slice: setting the received light intensity of second sensor as I02 when silicon slice edge tangential to the focusing light path of first sensor while detecting the received light intensity of the second sensor as IS2; comparing IS2and I02 to calculate the movement distance d, moving the transmission manipulator to compensate the center error. This invention is simple and low cost.
Claim：
Priority：
PCT：
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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
2008-3-31
  Selected patents owned by Tsinghua University filed in 2006 and 2007 are load.







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