6 freedom degree micromotion operating platform |
Title： |
| 6 freedom degree micromotion operating platform |
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Application Number： |
200710118130 |
Application Date： |
2007/06/29 |
Announcement Date： |
2007/11/28 |
Pub. Date： |
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Publication Number： |
101078889 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[] |
IPC： |
G03F 7/20 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Zhu Yu, Wang Jinsong, Zhang Ming, Li Guang, Xu Dengfeng, Yin Wensheng, Duan Guanghong, Jia Songtao |
Key Words： |
6 freedom degree, micromotion, operating platform |
Abstract： |
The invention discloses a 6 freedom degree micromotion bench in ultra precise processing and testing device technical domain, which is characterized by the following: possessing three groups of electromagnetic driving units; arranging in horizontal plane; driving the micromotion bench to X, Y, theta z3 freedom degree move in horizontal plane; arranging three electromagnetic driving units along vertical direction; driving the micromotion bench to Z, theta x and theta y3 freedom degree move. This invention possesses simple structure and higher displacement distinguishability, which can be used to realize 6 freedom degree motions for ultra precise process and check. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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