Body of microdiaphragm accelerating sensor and production thereof |
Title： |
| Body of microdiaphragm accelerating sensor and production thereof |
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Application Number： |
200510007632 |
Application Date： |
2005/02/07 |
Announcement Date： |
2006/08/16 |
Pub. Date： |
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Publication Number： |
1818665 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01P 15/12, G01D 5/16, H01L 49/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Zhou Zhaoying, Yang Xing, Xiao Mingfei |
Key Words： |
microdiaphragm, accelerating sensor, boby, production |
Abstract： |
An acceleration transducer of microdiaphragm type is prepared as setting round mass block at center of silicon diaphragm top and bottom surface ,placing a bulge ring at periphery place of said ring internal side to said block external side ,setting bulge ring at periphery of top and bottom covers and a bulge protection block at center of said covers, preparing N pair of gold electrode and leading wire on diaphragm and sensitive nanoelement, setting diaphragm between two said covers and bonding them together ,leading out wire by pressure welding .Its preparing process is also disclosed . |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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