Self-calibrating method and apparatus for ultra precise workbench |
Title： |
| Self-calibrating method and apparatus for ultra precise workbench |
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Application Number： |
200510011385 |
Application Date： |
2005/03/04 |
Announcement Date： |
2005/09/14 |
Pub. Date： |
2007/03/07 |
Publication Number： |
1667359 |
Announcement Number： |
1303400 |
Grant Date： |
2007-3-7 |
Granted Pub. Date： |
2007-3-7 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01B 21/04, G06F 17/10 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Wang Jinsong, Zhu YuZhu Liwei, Yin Wensheng, Duan Guanghong |
Key Words： |
ultra precise, workbench, self-calibrating, method, apparatus |
Abstract： |
The invention discloses an automatic calibration method and apparatus applied to three-dimensional ultra-sophisticated bench. The method is to set an automatic calibration model containing error message of grid glass sheets and calibrated bench through the medium of chromed grid glass sheets, and processes measured data of grid pip in different testing position to eliminate effects of position error of grid glass sheet grid pip. The invention also discloses an automatic calibration apparatus, comprising chromed grid glass sheets with grid pulser matrix, a positioning devise with optical components and XY plane position sensor, an image-gathering card and a computer storing related program. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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