Electrode antenna integrated photoelectric integrated sensor for testing strong electric field
Title：
Electrode antenna integrated photoelectric integrated sensor for testing strong electric field
Application Number：
 200610012160
Application Date：
 2006/06/09
Announcement Date：
 2006/11/15
Pub. Date：
Publication Number：
 1862264
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01R 29/12, G01R 19/00
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Zeng Rong, He Jinliang, Chen Weiyuan, Liang Wenlie
Key Words：
 strong electric field, test, integrated, photoelectric integrated, sensor
Abstract：
 The present invention relates to an electrode antenna unified photoelectric integrated sensor used for making strong electric field measurement, belonging to the field of high-voltage measurement technology. It is characterized by that it adopts a wafer with electro-optic effect, on the wafer surface said invention adopts titanium metal diffusion process or proton exchange process to form optical waveguides whose two ends are made into the form of Y-shaped bifurcation and middles are mutually parallel, on two mutually-parallel optical waveguides three inverted U-shaped electrode antennas whose tops are respectively equipped with a projection are set, said three mutually-parallel inverted U-shaped electrode antennas are crossed over two mutually-parallel optical waveguides. The invented photoelectric integrated sensor can be used for measuring the information of amplitude, frequency and phase of strong electric field signal.
Claim：
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