System for measuring hard disk magnetic head flight height and common-path dual-frequency laser interference measuring method
Title：
System for measuring hard disk magnetic head flight height and common-path dual-frequency laser interference measuring method
Application Number：
 200610080833
Application Date：
 2006/05/18
Announcement Date：
 2006/10/11
Pub. Date：
Publication Number：
 1844847
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01B 11/02, G01B 9/02, G11B 5/48
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Meng Yonggang, Lin Dejiao, Yue Zhaoyang, Song Nanhai, Yin Chunyong
Key Words：
 measuring, hard disk magnetic head, flight height, common-path dual-frequency laser interference
Abstract：
 The invention relates to a system for measuring disc magnetic head flying height and a share-path dual-frequency laser interference measure method, belonging to the optical measure technique. It comprises a transverse Zeeman laser, a low-reflective divide plate on the axes of laser sender, an adjustable splitting angle device formed by a semi-reflect divide plate and a reflector, a Woraston polarize splitting lens, a big diameter long focus lens, a magnetic head disc at the back focal plane of lens, two paths of interference and reference lights, a high-reflector, a deflection checker, and a optical-electric detector. The invention can improve the measure accuracy, resolution and sampling frequency, improve and compensate the Abbe error caused by the stable position change of disc, meet the demand of flying height that magnetic head relative to the glass simulate disc, and on the producing line, check the flying state of magnetic disc relative to the actual disc. The invention has lower cost, which it can be used in disc checking, and micro mechanical device vibration checking.
Claim：
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PCT：
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