Cobalt carbon film material which is prepared by PLD process and possesses positive large magnetic cesistance effect
Title：
Cobalt carbon film material which is prepared by PLD process and possesses positive large magnetic cesistance effect
Application Number：
 02153786
Application Date：
 2002/12/06
Announcement Date：
 2003/04/23
Pub. Date：
Publication Number：
 1412572
Announcement Number：
 1188543
Grant Date：
 2005-2-9
Granted Pub. Date：
 2005-2-9
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C23C 14/35, G01R 33/09
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Zhang Xiaozhong, Zhu Dandan, Xue Qingzhong
Key Words：
 Cobalt carbon film material, PLD process, positive large magnetic cesistance effect
Abstract：
 The method for preparing Co-C film with room temperature positive magnetic resistance effect is characterized by that on the Si(100) substrate using Co-C composite cold-pressed target material with different ratio, under the condition of argon gas with 3Pa utilizing PLD process to make deposition at a certain temp. to obtain the Co-C film. The thickness of said film can be about 60-100 nm, under the conditions of its temp. is 300K and externally-applied magnetic field is IT its positive magnetive resistance effect can be up to 22%, so that it is a good magnetic sensor material.
Claim：
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PCT：
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