Ag/TiO2 composite film with adjustable contact angle and preparation method thereof
Title：
Ag/TiO2 composite film with adjustable contact angle and preparation method thereof
Application Number：
 200410000727
Application Date：
 2004/01/16
Announcement Date：
 2004/12/29
Pub. Date：
 2007/02/07
Publication Number：
 1557990
Announcement Number：
 1298883
Grant Date：
 2007-2-7
Granted Pub. Date：
 2007-2-7
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C23C 14/34, C23C 14/06
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Zhang Gong, Zhuang Daming, Hou Yaqi
Key Words：
 Ag, TiO2, composite film, adjustable contact angle, preparation method
Abstract：
 The present invention is contact angle adjustable composite Ag/TiO2 film and its preparation process, and relates to hydrophilic photo semiconductor film technology. The present invention features that the film is one kind of composite TiO2 film with Ag grains deposited onto the surface. During the preparation, TiO2 film is first prepared through magnetically controlled sputtering capable of effectively controlling the film crystal structure and raising the hydrophilicity of the film, and nano size Ag grains are then deposited onto the TiO2 film. The composite Ag/TiO2 film has freely adjustable hydrophilicity and hydrophobicity and contact angle capable of being adjusted in relatively large range. Normally, the film has relatively high hydrophobicity to prevent fogging, and under irradiation of ultraviolet ray it has reduced contact angle for easy cleaning.
Claim：
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PCT：
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