Single slice three chambers type infrared heating superhigh vacuum CVD epitaxial system
Title：
Single slice three chambers type infrared heating superhigh vacuum CVD epitaxial system
Application Number：
 200310117188
Application Date：
 2003/12/05
Announcement Date：
 2004/11/17
Pub. Date：
 2006/05/03
Publication Number：
 1546743
Announcement Number：
 1254567
Grant Date：
 2006-5-3
Granted Pub. Date：
 2006-5-3
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C30B 25/02H01L 21/205H01L 21/365C23C 16/00
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Qian Peixin, Lin Huiwang, Liang Jubao
Key Words：
 Single slice, three chambers, infrared heating, vacuum, CVD, epitaxial system
Abstract：
 The invention discloses a single slice three chambers type infrared heating superhigh vacuum CVD epitaxial system, which comprises a reaction chamber, a sheet preloading chamber for taking the sample sheets, the front end of the chamber is isolated from the sheet loading chamber through a high vacuum valve, the rear end of the chamber is provided with a magnetic drive sample sheet holder, the upper end of the preloading chamber is provided with a flipping lid door sealed with a high vacuum sealing ring, the sheet loading chamber includes a sample sheet lifting platform driven by a cylinder, a sample sheet taking mechanical arm and a magnetic drive rod connected therewith.
Claim：
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PCT：
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