Method of forming texture epitaxial film on metallic substrate
Title：
Method of forming texture epitaxial film on metallic substrate
Application Number：
 200310117384
Application Date：
 2003/12/12
Announcement Date：
 2004/11/17
Pub. Date：
 2006/06/07
Publication Number：
 1546725
Announcement Number：
 1258618
Grant Date：
 2006-6-7
Granted Pub. Date：
 2006-6-7
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C23C 18/12H01L 39/24
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Wang Sansheng, Chen Sheng, Han Zhenghe
Key Words：
 texture, epitaxial film, metallic substrate, forming method
Abstract：
 The invention relates to a method of forming texture epitaxial film on metallic substrate, which comprising the steps of, rolling metal substrate strip, preparing the film coating solution, film coating on the rolled metallic substrate metallic strip, and heating to thermally decomposing the coating.
Claim：
Priority：
PCT：
LegalStatus：

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