Process for preparing Cu-In-Ga-Se or Cu-In-Ga-S film solar battery obsorbing layer
Title：
Process for preparing Cu-In-Ga-Se or Cu-In-Ga-S film solar battery obsorbing layer
Application Number：
 200510011858
Application Date：
 2005/06/03
Announcement Date：
 2006/01/11
Pub. Date：
Publication Number：
 1719625
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H01L 31/18, H01L 21/20, C23C 14/06, C23C 14/34, C23C 14/24
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Zhang Gong, Zhuang Daming, Ding Xiaofeng, Han Donglin, Zha Shan
Key Words：
 Cu-In-Ga-Se, Cu-In-Ga-S, film, solar battery, obsorbing layer, preparing process
Abstract：
 This invention relates to a preparation method for Cu In Ga Se or CuInGaS solar energy battery absorption layer, which prepares a CuInGa metal prefabricated layer with a vacuum magnet control sputter method on a NaCa glass Mo substrate then to be pre-evaporated in a thermal process vacuum chamber to be selenized or sulfurized characterizing that the target material applied in the vacuum sputter method is CuIn alloy or CuGa alloy or CuInGa alloy, the selenization or sulfurization is carried in vacuum, which rises the temperature of Se or S source to make them evaporate to spread a layer of Se or S on the prefabricated surface to be radiated by a halogen-tungsten lamp to generate selenized or sulfurized chemical reaction to get the CuInGse or GuInGs absorption layer.
Claim：
Priority：
PCT：
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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
2008-3-31
  Selected patents owned by Tsinghua University filed in 2006 and 2007 are load.







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