Method for preparing piezoelectric ceramic film
Title：
Method for preparing piezoelectric ceramic film
Application Number：
 200510063084
Application Date：
 2005/04/06
Announcement Date：
 2005/09/21
Pub. Date：
 2007/02/07
Publication Number：
 1669986
Announcement Number：
 1298674
Grant Date：
 2007-2-7
Granted Pub. Date：
 2007-2-7
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C04B 35/491, C04B 35/622, H01L 41/187
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Li Jingfeng, Kang Ni
Key Words：
 piezoelectric, ceramic film, preparing method
Abstract：
 The invention discloses a method for preparaing a kind of piezoelectric ceramic film which belongs to the field of functional ceramic materials and its manufacturing technique. The ceramic thick film is prepared by a two-steps method of the combination of electrophoretic deposition process and collosol instilment process, which coprises the following steps: making the ceramic powder into the stabilizing electrification suspending liquid, and making electrophoretic deposition on the substrate with conductivity or conducting electrode, then collosol infiltrating, heat treating and burning in low temperature to get the fine and close ceramic film. The invention combines the advantage of electrophoretic deposition process and sol-gal process, decreases the burning temperature and prepares the uniform thick film in the range of 10-100 um on the complex-shaped and open porous base plates, and the degree of compactness is high.
Claim：
Priority：
PCT：
LegalStatus：

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