Surface modification device based on laser induced in-situ chemical reaction |
Title: |
Surface modification device based on laser induced in-situ chemical reaction |
|
Application Number: |
200610011701 |
Application Date: |
2006/03/31 |
Announcement Date: |
2006/10/11 |
Pub. Date: |
|
Publication Number: |
1844443 |
Announcement Number: |
|
Grant Date: |
|
Granted Pub. Date: |
|
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
C23C 8/06, C23C 8/36, C23C 8/24 |
Applicant(s): |
Tsinghua University |
Inventor(s): |
Jin Yongji, Shao Tianmin |
Key Words: |
laser induced, in-situ chemical reaction, surface modification, device |
Abstract: |
This invention provides a surface capability transforming device, which bases on laser inducing original-position chemical reaction. The laser bean is focused onto the sample table in the vacuum room through the quartz window on the vacuum room panel after being reflecting by mirror; the movement control device is fixed on the foundation to drive the sample table to realize two-dimensional moving, wherein the sample table has resistance silk in it, and there are two electric batteries on the sample table; the needle valve is installed on the vacuum room panel, and the vacuum room is connected with the gas bottle through trachea; the bottom of the spiral valve connects with molecule pump, electromechanical isolating valve and mechanical pump, the whole base of the surface capability transforming device is fixed on the frame. This invention can be applied in electric making, aviation, vehicle industries and so on. |
Claim: |
|
Priority: |
|
PCT: |
|
LegalStatus: |
|
Relevancy information |
|
|
|
Other Patents of Same Inventor |
|
|
|
|
Last Update |
|
|
 |
2008-4-17 |
|
Selected patents owned by Tsinghua University filed in 2005 are loaded. |
 |
2008-3-31 |
|
Selected patents owned by Tsinghua University filed in 2006 and 2007 are load. |
|
|