This invention relates to one photon transistor surface circle structure test method in plane structure test and optical test force technique field, which comprises the following steps: using laser to scan polymer focus lens line as reference grating and the photon transistor surface circle structure is of test grating; through generating intervention to form clear LSCM beam and through extracting seam equation solving the test grating equation by reverse formula to get object surface micro nanometer size circle structure size to represent large range integral structure property.