Scanning thermal microscope probe
Title：
Scanning thermal microscope probe
Application Number：
 200510037509
Application Date：
 2005/09/22
Announcement Date：
 2007/03/28
Pub. Date：
Publication Number：
 1937094
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G12B 21/08, G01N 13/16, B81B 7/02
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
Key Words：
 Scanning, thermal, microscope probe
Abstract：
 The probe includes following parts: a cantalever; a first conductive layer formed on surface of the cantalever; having a through hole, an insulating layer of covering on surface of the first conductive layer; a second conductive layer of covering on surface of the insulating layer; the first conductive layer and the second conductive layer are connected at the through hole so as to form a thermocouple area; a Nano carbon tube formed on the thermocouple area. One end of the Nano carbon tube is connected to the second conductive layer at the thermocouple area, and the other end is as a free end. The Nano carbon tube is placed at tip of probe. Using microsize and axial heat-conducting property raises space resolution of scanning heatable stage microscope remarkably.
Claim：
Priority：
PCT：
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  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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