Method for controlling carbon nanometer tube three-dimension graphics type growth by spray plating precious metal membrane
Title：
Method for controlling carbon nanometer tube three-dimension graphics type growth by spray plating precious metal membrane
Application Number：
 200510098719
Application Date：
 2005/09/07
Announcement Date：
 2006/02/08
Pub. Date：
 2007/06/20
Publication Number：
 1730387
Announcement Number：
 1321886
Grant Date：
 2007-6-20
Granted Pub. Date：
 2007-6-20
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 C01B 31/02, C23C 14/24, C23C 16/26, B82B 3/00
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Zhang Zhengjun, Zhou Ya, Yue Yang
Key Words：
 spray plating, precious metal membrane, carbon nanometer tube, three-dimension graphics type,growth
Abstract：
 The invention discloses a method for controlling carbon nano tube three-dimension graphical growing by utilizing jet plated precious metal films, which belongs to the technology field of nano material preparation and consists of the following steps, using precious metal such as Au or Ag as targeting material, covering masks of right shape and number of layers onto clean silicon substrate, spraying precious metal film in a vacuum coater, placing the processed silicon wafers into a quartz vacuum tubular furnace, using ferrocene and dimethylbenzene as reactants, preparing carbon nano tubes with chemical vapour deposition method while controlling the growth time.
Claim：
Priority：
PCT：
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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
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