Thin-film solar cell substrate preparing technology
Title:
Thin-film solar cell substrate preparing technology
Application Number:
200310117093
Application Date:
2003/12/09
Announcement Date:
2004/11/17
Pub. Date:
2007/06/20
Publication Number:
1547263
Announcement Number:
1322594
Grant Date:
2007-6-20
Granted Pub. Date:
2007-6-20
ApplicationType:
Invention
State/Country:
11[China|beijing]
IPC:
H01L 31/18H01L 31/04H01L 21/00
Applicant(s):
Tsinghua University
Inventor(s):
Huang Yong, Li Haifeng, Zhang Houxing
Key Words:
Thin-film, solar cell, substrate, preparing technology
Abstract:
The invention discloses a manufacturing process for a kind of film solar energy battery substrate belonging to the solar battery material manufacturing range. The Si and the SiC are blended together, through being baked, the silicon is melted to bond the SiC into shape, the thin piece with flat and tight surface can be produced, and the high quality multi-crystal silicon film is deposited on the surface. The invention avoid the process of high temperature baking needed by normal ceramic substrate, it has advantage to form the large particle and high quality multi-crystal silicon film, it also can avoid the fracture problem in the cooling process; it decreases the cost further.
Claim:
Priority:
PCT:
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