Manufacturing method of sonic surface wave gas sensor |
Title： |
| Manufacturing method of sonic surface wave gas sensor |
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Application Number： |
200710064333 |
Application Date： |
2007/03/12 |
Announcement Date： |
2007/09/12 |
Pub. Date： |
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Publication Number： |
101034083 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01N 29/028H01L 49/00 |
Applicant(s)： |
Tsinghua University |
Inventor(s)： |
Li Qiang, Li Dongmei, Pan Feng |
Key Words： |
sonic surface wave, gas sensor, Manufacturing |
Abstract： |
This invention discloses a manufacturing method of acoustic surface wave gassy sensor which belongs to sensor manufacturing engineering. This method is coating a layer active metal ( Al, Mg, Zn, Sn) on gassy sensor figure that will grow sensitivity film, then through photoengraving and wet method sculpture to make the aurum ( Ag or Pt) membrane that demand self assembly sensitivity film expose. the transducer IDT is covered up by active metal, at last carry out monomolecular self assembly, then immerge device after self assembly to in common use alkali or acid corrosion solution to wipe off active metal. This invention supply method of accurately self assembly sensitivity membrane on aurum (or Pt) membrane surface in sound propagation path, and shield rest aurum (Ag or Pt) membrane. At the same time the method advances the size precision of self assembly sensitivity membrane. So greatly advance precision of acoustic surface wave gassy sensor. |
Claim： |
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PCT： |
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