Integrated photon crystal double waveguide back coupling fluid refractive index sensor |
Title： |
| Integrated photon crystal double waveguide back coupling fluid refractive index sensor |
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Application Number： |
200710064457 |
Application Date： |
2007/03/16 |
Announcement Date： |
2007/08/22 |
Pub. Date： |
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Publication Number： |
101021593 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G02B 6/10G02B 6/12G02B 6/26G01N 21/41 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Mao Xiaoning, Huang Yidong, Zhang Wei, Peng Jiangde |
Key Words： |
photon, crystal, double waveguide, refractive index, sensor |
Abstract： |
The invention belongs to the photoelectronic technical field, characterized in that: it adopts electron beam exposure and dry-etching process to form a photon crystal double-waveguide structure on semiconductor, where the two ends of the photon crystal waveguide are connected with light guide connection light waveguides and it removes part of the sacrificial layer by wet etching process to form a bridge support structure. By reverse coupling action of the photon crystal double waveguide, the light of evenly symmetric transmission mode cross over frequency can be reversely coupled from straight-through waveguide into coupling waveguide so as to cause the transmission spectrum of the straight-through waveguide has obvious hollows. When the detected fluid fills periodical holes of photon crystal or upper and lower spaces of the photon crystal layer, dispersion characteristic of the transmission mode in the photon crystal double waveguide is changed, or changed by external force, which can cause variation of evenly symmetric transmission mode cross over frequency so as to cause variation of transmission spectrum of the straight-through waveguide, thus implementing microflow refractivity detection and sensing of high sensitivity and integrated photon crystal structure. |
Claim： |
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PCT： |
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