Scanner with array light source for IC photo etching system |
Title： |
| Scanner with array light source for IC photo etching system |
|
Application Number： |
01120600 |
Application Date： |
2001/07/26 |
Announcement Date： |
2002/02/27 |
Pub. Date： |
2004/03/10 |
Publication Number： |
1337601 |
Announcement Number： |
1141620 |
Grant Date： |
|
Granted Pub. Date： |
2004-3-10 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G02B 26/10, G03F 7/20 |
Applicant(s)： |
Qinghua Univ. |
Inventor(s)： |
Xu Duanyi, Qi Guosheng, Jiang Peijun |
Key Words： |
Scanner, array light source, IC, photo etching system |
Abstract： |
The invented apparatus comprises linear array light source formed from n short-wavelength micro light sources and miniature imaging system making said light source implement small visual field and near field technique. The described linear array light source is obtained by arranging n adjacent micro light sources into a straight line, and the switch of every micro light source can be independently controlled. The invention raises the system photoetching resolution, can implement graphic photoetching manufacture of integrated circuit with minimum size, and can implement width scanning, its scanning width can be regulated at all times, so that it can greatly raise working efficiency. |
Claim： |
|
Priority： |
|
PCT： |
|
LegalStatus： |
|
Relevancy information
