Linear-array light source for photoetching scanner of array-type integrated circuit |
Title: |
Linear-array light source for photoetching scanner of array-type integrated circuit |
|
Application Number: |
01144580 |
Application Date: |
2001/12/21 |
Announcement Date: |
2002/07/03 |
Pub. Date: |
2004/10/06 |
Publication Number: |
1356595 |
Announcement Number: |
1170209 |
Grant Date: |
2004-10-6 |
Granted Pub. Date: |
2004-10-6 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
G02B 27/00, G03F 7/20, H04N 1/04 |
Applicant(s): |
Qinghua Univ |
Inventor(s): |
Xu Duanyi, Qi Guosheng, Jiang Peijun |
Key Words: |
Linear-array light source, photoetching scanner, array-type, integrated circuit |
Abstract: |
A linear-array light source for the scanner used to photoetch on array-type integrated circuit is composed of n semiconductor lasers as light source, n convergent lens, n bunches of m optical fibres, m optical fibre head linear arrays of n optical fibres, and imaging lens correspondent to said linear arrays. The said linear array has opticla fibre array layer, light intensity equalizing layer, and phase aperture layer. Its advantages include high lighting uniformity and higher resolution. |
Claim: |
|
Priority: |
|
PCT: |
|
LegalStatus: |
|