Abstract： |
A nm-class polishing liquid is prepared through mechanically grinding nm-class diamond powder, baking, adding non-ionic dispersion stabilizer, heating while mixing, and adding light white oil or naphtha, antistatic agent, cleaner and pH regulator, while stirring to obtain suspension. It has high polishing quality (sub-nm class), and can be used for polishing magnetic head, optical element and ceramics. |
Relevancy information
