Magnetic particle film having controllable magnetic anisotropy and preparing method thereof
Title：
Magnetic particle film having controllable magnetic anisotropy and preparing method thereof
Application Number：
 200410009791
Application Date：
 2004/11/12
Announcement Date：
 2005/06/29
Pub. Date：
 2007/07/18
Publication Number：
 1632892
Announcement Number：
 1327459
Grant Date：
 2007-7-18
Granted Pub. Date：
 2007-7-18
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 H01F 10/10, H01F 41/14, H01F 41/16, H01F 41/18
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Zhao Jiahao, Zhu Jing, Ou Dingrong
Key Words：
 Magnetic particle film, controllable, magnetic anisotropy, preparing method
Abstract：
 It is a controllable magnetic anisotropic particle thin film and its process method and relates to a high frequency communication chip integration inductance device nanometer magnetic film and its process. This invention uses non-continuous multi-layer film alternate magnetic control spatter method to get the permalloy to SiO#-[2] magnetic particle film, wherein the said permalloy volume percent in the film is between fifty to eighty percent and exists as particle in the non-crystal isolation medium SiO#-[2].
Claim：
Priority：
PCT：
LegalStatus：

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