Resonant tunneling micro mechanical force sensor and method for manufacturing the same |
Title: |
Resonant tunneling micro mechanical force sensor and method for manufacturing the same |
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Application Number: |
200410091549 |
Application Date: |
2004/11/19 |
Announcement Date: |
2005/06/29 |
Pub. Date: |
2006/10/11 |
Publication Number: |
1632486 |
Announcement Number: |
1279338 |
Grant Date: |
2006-10-11 |
Granted Pub. Date: |
2006-10-11 |
ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
G01L 1/00, G01P 15/08, B81B 7/02 |
Applicant(s): |
Tsinghua University |
Inventor(s): |
Guo Linrui, Ye Xiongying, Zhou Zhaoying |
Key Words: |
Resonant tunneling, micro mechanical force, sensor, manufacturing method |
Abstract: |
It is resonance tunneling micro mechanical force sensor and its process method, which belongs to micro mechanical system and sensor technique field. This invention discloses a resonance tunneling micro mechanical force sensor, which mainly comprises upper and down silicon pad, wherein, the upper silicon pad has grown tunneling positive electrode on down surface; the down silicon pad has grown tunneling negative electrode in the upper surface at relative position area. The tunneling negative electrode surface grows multiple thin films of tunneling knots. The multiple structures is formed by isolation layer material and metal material alternately or by different gap semi-conductive material. This invention also discloses the process method of the said micro mechanical force sensor. |
Claim: |
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Priority: |
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PCT: |
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