Abstract： |
The invention belongs to micro flow pump technology field in precision machinery, which refers to micro film pump, which is made up of an upper and a subjacent bracket, a piece of cover, a film and a double-swage beam; the two brackets are integrated together, the cover piece, film and cushion are pressed and overlapped between the two brackets; there has a ventilation hole in the middle part of the upper bracket to make the piece extrude out, the cover piece has two ventilation holes acted on liquid inlet and outlet; the middle part of the film forms liquid storing, and flow area, the area includes liquid inlet, the first micro valve, pump cavity, the second micro valve whose direction is the same to the first micro valve direction, liquid outlet, the bottom of the area is pump film, the cover combines with the film and forms the pump. The structure of the invention is simple, it is reliable. |
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