Low voltage micro liquid drop control device |
Title： |
| Low voltage micro liquid drop control device |
|
Application Number： |
200410057319 |
Application Date： |
2004/08/27 |
Announcement Date： |
2005/03/02 |
Pub. Date： |
2007/05/02 |
Publication Number： |
1588090 |
Announcement Number： |
1313830 |
Grant Date： |
2007-5-2 |
Granted Pub. Date： |
2007-5-2 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01N 35/10, G01N 27/26 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Feng Yanying, Zhou Zhaoying, Ye Xiongying |
Key Words： |
Low voltage, micro liquid drop, control device |
Abstract： |
The invention relates to micro-drop control device with low voltage, which belongs to micro electromechanical technology and microflow control technology fields. The invention includes an upper and a lower layers of chips and correspondent control circuits; the lower chip is made up of a subjacent base board, control circuit array and drain insulating layer; the tow layers of chip is connected mechanically by a supporting structure, the reference electrode layer and the control electrode array are connected by a control circuit, the reference electrode layer is grounded, the circuit electrode array applies positive voltage through a switch; the surface of the lower chip has a micro structure which can enhancing the surface humidity regularly. The invention has all the merits of current device, and the control speed is quick, the consumption is low, and the volume of the device is small. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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