Temperature controllable polishing tool
Title：
Temperature controllable polishing tool
Application Number：
 200410030782
Application Date：
 2004/04/09
Announcement Date：
 2005/01/12
Pub. Date：
Publication Number：
 1562571
Announcement Number：
Grant Date：
Granted Pub. Date：
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 B24D 17/00
Applicant(s)：
 Tsinghua Univ.
Inventor(s)：
 Cheng Yingbo, Feng Zhijing, Ren Yingwei
Key Words：
 Temperature controllable, polishing tool
Abstract：
 A temp controllable polishing tool with circular plate shape features that the miniature temp controlling relay and heater are arranged in the insulating layer between heat-transfer base plate and the substrate of polishing head, and the polishing layer is adhered on the external surface of heat-transfer base plate. The surface shape of said polishing layer is same as the surface to be polished.
Claim：
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PCT：
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2008-4-17
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