Optimized piezo driven micro spraying device and fabricating method |
Title: |
Optimized piezo driven micro spraying device and fabricating method |
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Application Number: |
200410003470 |
Application Date: |
2004/03/26 |
Announcement Date: |
2005/01/12 |
Pub. Date: |
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Publication Number: |
1562398 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
A61M 11/00 |
Applicant(s): |
Tisinghua Univ. |
Inventor(s): |
Zhou Zhaoying, Zhu Junhua, Du Guibin |
Key Words: |
Optimized, piezo driven, micro spraying device, fabricating method |
Abstract: |
An optimized microsprayer driven piezoelectrically is composed of a membrane with spray orifices, an elastic cavity membrane and piezoelecric sheet on whose both surfaces the aluminium electrodes are plated. said elastic cavity membrane is combined with said piezoelectric sheet to form a piezoelectric transducer. said orifice membrane is adhered with said electric cavity membrane to form a closed liquid cavity. Its advantages are no water membrane, and increased flow. |
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Priority: |
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PCT: |
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