Target tray vertical scanning moving mechanism in ion implantation apparatus |
Title： |
| Target tray vertical scanning moving mechanism in ion implantation apparatus |
|
Application Number： |
200410008464 |
Application Date： |
2004/03/12 |
Announcement Date： |
2005/01/05 |
Pub. Date： |
2006/11/01 |
Publication Number： |
1560897 |
Announcement Number： |
1282985 |
Grant Date： |
2006-11-1 |
Granted Pub. Date： |
2006-11-1 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01J 37/317, H01L 21/265 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Wang Jinsong, Zhu Yu, Chen Tao |
Key Words： |
Target tray, vertical scanning, moving mechanism, ion implantation apparatus |
Abstract： |
The invention is a vertical scan moving mechanism in the ion injector, which belongs to semi-conductor device technology field. The invention discloses a 2-freedom parallel mechanism with extensible and double branch chains structure, which includes a target plate, the first branch chain of the extensible leg, the second branch chain of the extensible leg, the target plate is arranged with a silicon plate for receiving ion injection. One end of the first branch chain of the extensible is connected to first assembly point in the injection cavity of the ion injector through rotating hinge, another end is connected to a point of the target plate through rotating hinge; one end of the second branch chain of the extensible leg is fixed on the second assembly point of the injection cavity of the ion injector, another end is connected to another point of the target plate through rotating hinge. |
Claim： |
|
Priority： |
|
PCT： |
|
LegalStatus： |
|
Relevancy information
