Target tray oblique scanning moving mechanism in ion implantaton apparatus |
Title： |
| Target tray oblique scanning moving mechanism in ion implantaton apparatus |
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Application Number： |
200410008463 |
Application Date： |
2004/03/12 |
Announcement Date： |
2005/01/05 |
Pub. Date： |
2006/10/11 |
Publication Number： |
1560896 |
Announcement Number： |
1279573 |
Grant Date： |
2006-10-11 |
Granted Pub. Date： |
2006-10-11 |
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01J 37/317, H01L 21/265 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Wang Jinsong, Zhu Yu, Chen Tao |
Key Words： |
Target tray, oblique scanning, moving mechanism, ion implantaton apparatus |
Abstract： |
The invention is a target plate tilt scan moving mechanism in the ion injector, which belongs to semi-conductor device technology field. The invention discloses a 3-freedom plane parallel mechanism with extensible leg and double branch chains structure, which includes target plate, the first branch chain of the extensible leg and the second branch chain of the extensible leg, the target plate is assembled with a silicon piece with ion injection. Two ends of the two chains are connected to the two assembly points in the injection cavity of the ion injector through rotary hinge; the other two ends are connected to the two assembly points of the target plate through rotary hinge. The hinge between one branch chain and the injection cavity are active joint, rotate through driving the executer. The invention has a simple structure, the rigidity is large, and the gearing chain is short. The driving motor can be arranged outer, thus, it avoids the magnetism field disturbance. |
Claim： |
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Priority： |
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PCT： |
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LegalStatus： |
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