Mini type silicon base self oxygen absorption fuel battery electrode plate and its making method |
Title： |
| Mini type silicon base self oxygen absorption fuel battery electrode plate and its making method |
|
Application Number： |
200510086751 |
Application Date： |
2005/11/01 |
Announcement Date： |
2006/03/29 |
Pub. Date： |
|
Publication Number： |
1753220 |
Announcement Number： |
|
Grant Date： |
|
Granted Pub. Date： |
|
ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
H01M 4/86, H01M 4/88, H01M 8/02 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Wang Xiaohong, Jiang Yingqi, Zhong Lingyan |
Key Words： |
Mini type silicon base, self oxygen absorption, fuel battery, electrode plate, making method |
Abstract： |
The invention is a micro Si-bulk oxygen-selfabsorbing fuel battery pole plate and the making method thereof, belonging to micro energy source and machining fields. For solving the problems of the existing silicon bulk corroding technique that cofilm electrodes have oversmall contact area and do not fully contact, the invention provides a micro Si-substrate oxygen-selfabsorbing fuel battery pole plate, comprising oxygen-selfabsorbing cathode pole plate and anode pole plate, where the contact area of the cathode pole plate with the film electrode side is greater than that of it with the air side. For solving the problems of overhigh technical cost and being unable to make batch production for oxygen-selfabsorbing fuel battery pole plate, the invention also discloses a method for making the micro Si-bulk oxygen-selfabsorbing fuel battery pole plate, comprising the steps of producing silicon bulk corroding mask layer, photoetching patterns on two sides of pole plate by double-faced photoetching technique, making silicon bulk corrosion in 30-40wt% KOH solution on conditions of 70-80 deg.C and ultrasonic blending, and sputtering current collecting layer. |
Claim： |
|
Priority： |
|
PCT： |
|
LegalStatus： |
|
Relevancy information
