Multiple-pattern atomic force probe scanning system
Title：
Multiple-pattern atomic force probe scanning system
Application Number：
 200510011612
Application Date：
 2005/04/22
Announcement Date：
 2005/09/21
Pub. Date：
 2007/06/20
Publication Number：
 1670505
Announcement Number：
 1322323
Grant Date：
 2007-6-20
Granted Pub. Date：
 2007-6-20
ApplicationType：
 Invention
State/Country：
 11[China|beijing]
IPC：
 G01N 13/16
Applicant(s)：
 Tsinghua University
Inventor(s)：
 Li Yuhe, Wang Dongsheng, Li Qingxiang, Ge Yangxiang
Key Words：
 Multiple-pattern, atomic force probe, scanning system
Abstract：
 This invention discloses one multi-mode atomic force detector scanning system, which comprises optical measurement unit, scanning and detecting unit and servo control unit wherein, the said scanning and detecting unit comprises the scanning bench driven by servo control unit, micro-adjusting structure, piezoelectricity double transistor pads located on the structure, micro hanging detecting needle relatively located on the detecting end and with ends fixed on transistors; the said hanging back is located on the light detector focus and is vertical to eh detector axis line; the said piezoelectricity pad is controlled by servo control unit and the driving hanging detector works by one mode of contacting one, non-contacting and taping one.
Claim：
Priority：
PCT：
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2008-4-17
  Selected patents owned by Tsinghua University filed in 2005 are loaded.
2008-3-31
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