Integrated optic grating interference micro mechanical acceleration sensor and its producing method |
Title： |
| Integrated optic grating interference micro mechanical acceleration sensor and its producing method |
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Application Number： |
200610169643 |
Application Date： |
2006/12/26 |
Announcement Date： |
2007/06/27 |
Pub. Date： |
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Publication Number： |
1987486 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01P 15/093, B81B 7/02, B81C 1/00, B81C 3/00 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Ye Xiongying, Wu Kang, Zhou Zhaoying, Wang Xiaohao |
Key Words： |
optic grating, interference, micro mechanical acceleration, sensor, producing method |
Abstract： |
The acceleration sensor includes parts: metal grating and electrode setup on surface of the first sheet glass; mass block setup on silicon chip, N pieces of male tab setup on the mass block, and a layer of reflection plane deposited on male tabs; girder or membrane of supporting mass block, and the other end of the mass block connected to the bonding top of table-board formed from silicon chip; the face, where the metal grating and electrode are located, of the first sheet glass is opposite to the reflection plane on mass block, and the position of grating is opposite to the position of silicon island and integrated together through bonding technique; tiny gap is formed between mass block and glass so as to form sensing unit of the sensor; photoelectric detection circuit is connected to electrode of the sensing unit. By using sensibility of light intensity of grating diffracted light spot dependent on distance between grating surface and reflection plane, to implement measuring acceleration. |
Claim： |
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Priority： |
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PCT： |
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