Surface modification device based on laser induced in-situ chemical reaction
Title:
Surface modification device based on laser induced in-situ chemical reaction
Application Number:
200610011701
Application Date:
2006/03/31
Announcement Date:
2006/10/11
Pub. Date:
Publication Number:
1844443
Announcement Number:
Grant Date:
Granted Pub. Date:
ApplicationType:
Invention
State/Country:
11[China|beijing]
IPC:
C23C 8/06, C23C 8/36, C23C 8/24
Applicant(s):
Tsinghua University
Inventor(s):
Jin Yongji, Shao Tianmin
Key Words:
laser induced, in-situ chemical reaction, surface modification, device
Abstract:
This invention provides a surface capability transforming device, which bases on laser inducing original-position chemical reaction. The laser bean is focused onto the sample table in the vacuum room through the quartz window on the vacuum room panel after being reflecting by mirror; the movement control device is fixed on the foundation to drive the sample table to realize two-dimensional moving, wherein the sample table has resistance silk in it, and there are two electric batteries on the sample table; the needle valve is installed on the vacuum room panel, and the vacuum room is connected with the gas bottle through trachea; the bottom of the spiral valve connects with molecule pump, electromechanical isolating valve and mechanical pump, the whole base of the surface capability transforming device is fixed on the frame. This invention can be applied in electric making, aviation, vehicle industries and so on.
Claim:
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PCT:
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