Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner |
Title: |
Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner |
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Application Number: |
200610076247 |
Application Date: |
2006/04/21 |
Announcement Date: |
2006/09/27 |
Pub. Date: |
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Publication Number: |
1838330 |
Announcement Number: |
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Grant Date: |
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Granted Pub. Date: |
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ApplicationType: |
Invention |
State/Country: |
11[China|beijing] |
IPC: |
G12B 5/00, G12B 9/10, B25H 1/00 |
Applicant(s): |
Tsinghua University |
Inventor(s): |
Wang Jinsong, Zhu Yu, Cao Jiayong, Yin Wensheng, Duan Guanghong, Yang Yibo |
Key Words: |
parallel-connection driving, plane, 3-DOF, micropositioner |
Abstract: |
This invention relates to an electromagnetic force parallel-connection driving type plane 3-DOF micropositioner, which comprises a workpiece table, a base, an electromagnetic-drive unit with some elements composed by non-contact stator made from permanent magnets and ferromagnetic material and fixed on the base and rotor fixed on stator core to let the magnetization direction of permanent magnet vertical to workpiece table motion plane, a plane guide unit, and a position detection sensor. Wherein, fixing the square coil in the rotor to the workpiece table by coil skeleton or connecting element to let there are two opposite effective sides parallel to the workpiece motion plane. This invention improves the linearity feature of the electromagnetic force, reduces control difficulty, and raises response speed. |
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