Array vertical cavity-surface transmission laser confocal microscopic system |
Title： |
| Array vertical cavity-surface transmission laser confocal microscopic system |
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Application Number： |
200610065712 |
Application Date： |
2006/03/14 |
Announcement Date： |
2006/08/09 |
Pub. Date： |
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Publication Number： |
1815137 |
Announcement Number： |
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Grant Date： |
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Granted Pub. Date： |
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ApplicationType： |
Invention |
State/Country： |
11[China|beijing] |
IPC： |
G01B 9/04, G01B 11/24 |
Applicant(s)： |
Tsinghua Univ. |
Inventor(s)： |
Liu Dejiao, Liu Yin, Yan Juqun, Li Yan, Yin Chunyong |
Key Words： |
Array vertical, cavity-surface transmission, laser, confocal microscopic |
Abstract： |
Present invention discloses array vertical cavity surface emission laser confocal microscopic system belonging to surface topography measuring technique. It contains light source, measurement and processing, wherein light source being vertical cavity surface emission laser array to realize character extraction to workpiece surface corresponded each measuring point, signal processing part consisting of optical signal receiver and work control computer, measurement part including beam extend collimating lens, spectroscope and one long tube micro objective. System uses optical scanning method partially substituting workbench mechanical type scanning in tradition instrument, thereby reducing vibration interference and raising detection speed. Absoluteness distance measurement can b realized for increasing measuring range Through increasing vertical cavity surface emission laser linear frequency modulation and phase-detecting means. Said system can be widely used in different kinds of free curved face, micro - mechanical MEMS device, micro-electronics mask, biochips etc precision surficial measurement. |
Claim： |
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Priority： |
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PCT： |
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